直流磁控溅射Cr(Al)N薄膜的结构与性能比较研究  

Comparative Study on Structure and Properties of Cr(Al)N Coatings Deposited by DC Magnetron Sputtering

作　　者：张诤[1] 尹小定[2] 王社斌[3] 余春燕[3] 

机构地区：[1]江西理工大学南昌校区机电系,南昌330013 [2]江西蓝天学院制造系,南昌330098 [3]太原理工大学材料科学与工程学院,太原030024

出　　处：《材料导报（纳米与新材料专辑）》2008年第3期359-362,共4页

基　　金：国家自然科学基金资助项目(20271037)

摘　　要：采用相同的基底偏压和靶基距离,以N_2流量和靶材溅射功率为变量,以热作模具用钢H13和Si片为基底,用直流磁控溅射的方法沉积了CrN和CrAlN膜层。对这2种膜层用SEM测其表面形貌,用X射线衍射测其膜层结构,用M-400-H1测其表面显微硬度,用WS-97划痕仪测其膜层/基体之间的结合强度,用UMT-2摩擦磨损试验机测其表面摩擦磨损性能。在分析溅射变量对2种膜层的影响趋势的同时,也分析了Al元素加入后所获得的CrAlN与CrN在结构、力学性能(硬度和膜/基粘结强度)和摩擦性能上的变化趋势。CrN and CrAlN coatings are deposited by magnetron sputtering at the same substrate bias voltage and fixed distance between the target and the chamber wall, with variable flux of N2 and sputtering power of targets. The characterizations of two kinds of coatings are as follows： the microstructure is characterized by scanning electron microscopy（SEM） ;the crystal structure is determined using X-ray diffraction（XRD） ; the surface hardness is measured by M-400-H1 ; the adhesion strength is tested using WS-97 nick and the wear test is carried out using UMT-2 micro-tribometer. The trend of the effect of variables on the two kinds of coatings is analyzed. Simultaneously, the difference between CrAlN coatings and CrN coatings is compared in structure, mechanics（hardness and adhesion strength of coatings to substrate）and tribology with respect to the addition of Al dement.

关 键 词：CrN膜层 CrAlN膜层 磁控溅射 粘结强度 磨损 

分 类 号：TG174.44[金属学及工艺—金属表面处理]