基于MATLAB的表面三维微观形貌图像处理分析  

Surface 3D micro-topography analysis using image processing technology based on matlab

作　　者：仲进安[1] 

机构地区：[1]桂林电子科技大学电子工程学院,广西桂林541004

出　　处：《光学技术》2007年第S1期104-105,107,共3页Optical Technique

基　　金：桂林电子科技大学测控专业教改项目

摘　　要：表面形貌影响光学元件的机械性能、物理性能、成品率;在特定应用场合下,通过检测光学元件表面三维微观形貌来检测光学元件的加工质量。将工件表面置于光学显微镜焦面上观测,如观测到工件表面某处存在明显缺陷,通过光学显微镜上下数次微移动,对工件表面该处采集多幅对焦图像并进行图像处理,根据处理结果判别工件是否符合加工要求。文中提出了一种基于MATLAB6.0高级语言编写的图像处理软件,实现对数幅对焦图像进行分析处理进而拟合出表面微观形貌的三维图形。Surface micro-geometrical structure affect the mechanical property,optical property and manufacturing yield of optical component,so the quality control of optical component is ensured by measuring surface microtopography in special conditions.Workpiece surface is observed under a microscope whose lens is kept in focusing position.When the distinct defect of workpiece are found,Multiple focus images are gained through jiggling microscope up and down and the quality of workpiece is identified based on image processing.The paper put forward an image processing software based on Matlab in order to display 3D surface micro-topography by analyzing multiple focus images.

关 键 词：光学测量 微观形貌 图像检测 MATLAB 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]