移相干涉测量中的抗振技术  

Antivibration technique in phase-shifting interferometry

作　　者：左芬[1] 陈磊[1] 

机构地区：[1]南京理工大学电光学院

出　　处：《光学技术》2007年第S1期164-167,170,共5页Optical Technique

摘　　要：移相干涉测量技术是一种众所周知的非接触式的高精密测量方法,具有广泛的应用范围。环境振动是移相干涉仪测量误差的主要来源之一,国际上一些从事干涉测量的工作人员提出了许多抗振的方法,大体上分为主动技术和被动技术。主动抗振技术主要是系统自身探测振动并通过反馈回路对振动进行补偿,被动抗振技术则是通过各种技术措施尽量减小干涉仪对环境振动和气流影响的敏感度。从这两方面对干涉仪的抗振技术研究的进展做简单介绍,并介绍了作者所在课题组在这两个方面所进行的研究工作。Known to all,phase shifting interferometry is a well accurate technique and is applied in many fields.Vibration is one of the main error sources in the phase shifting interferometry.A number of methods have been put forward by the researchers all over the world which are classified into two categories,the active and passive vibration resistant techniques.The first is that the system test vibration and compensate it and the latter means to reduce the system's sensitivity of vibration by many techno-method.And the development of them is presented.In the end,the work on these two methods by the author's group is introduced.

关 键 词：光学测量 移相干涉仪 主动抗振 被动抗振 

分 类 号：TH744.3[机械工程—光学工程]