Synthesis of nanoscale multilayered ZrN/W coatings by ion beam assisted deposition  

作　　者：LI DeJun ZHANG JingJing WANG MingXia 

机构地区：[1]College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300074,China

出　　处：《Science China(Technological Sciences)》2007年第2期206-212,共7页中国科学（技术科学英文版）

基　　金：Supported by the National Natural Science Foundation of China (Grant No. 50472026)

摘　　要：ZrN/W multilayered coatings with different modulation periods at the nanoscale have been synthesized at different N+ beam bombarding energies using IBAD. Various characterization techniques such as XRD, AES, nano indenter and profiler were employed to investigate the influence of modulation period and bombarding energy on microstructure and mechanical properties of the coatings. The results showed that all superlattice coatings had better mechanical properties than the monolithic ZrN and W coatings. At an optimal condition with 300 eV N+ beam bombarding energy and 8―9 nm modulation period, XRD pattern possessed a sig- nificantly structural mixture of strong ZrN (111), W (110), as well as weak ZrN (220) textures in the multilayered coating. The optimal condition resulted in higher hardness (26 GPa), elastic modulus (310 GPa) and fracture resistance of the coat- ing than other conditions.ZrN/W multilayered coatings with different modulation periods at the nanoscale have been synthesized at different N+ beam bombarding energies using IBAD. Various characterization techniques such as XRD, AES, nano indenter and profiler were employed to investigate the influence of modulation period and bombarding energy on microstructure and mechanical properties of the coatings. The results showed that all superlattice coatings had better mechanical properties than the monolithic ZrN and W coatings. At an optimal condition with 300 eV N+ beam bombarding energy and 8–9 nm modulation period, XRD pattern possessed a significantly structural mixture of strong ZrN (111), W (110), as well as weak ZrN (220) textures in the multilayered coating. The optimal condition resulted in higher hardness (26 GPa), elastic modulus (310 GPa) and fracture resistance of the coating than other conditions.

关 键 词：IBAD ZrN/W MULTILAYERED coating NANOSCALE 

分 类 号：TG174.444[金属学及工艺—金属表面处理]