Infrared spectra study associated with hydrogen impurity in low pressure CVD diamond films  

作　　者：Huifang Fu Xianghui Zhang Entao Yan Shunsheng Liu 

机构地区：[1]Chinese Acad Sci, Changsha Inst Geotecton, Changsha 410013, Peoples R China

出　　处：《Chinese Science Bulletin》1999年第16期1508-1511,共4页

摘　　要：The infrared absorbance peaks at 2 852.4, 2 924.3, 2963.0 and 3 034.9 cm-1 have been observed in diamond films made by the direct current arc discharge plasma chemical vapor deposition. Three former absorbance peaks have been assigned to C-H stretching in SP3 configuration, 3 034.9 cm-1 has been assigned to C-H stretching in SP2 configuration. TheThe infrared absorbance peaks at 2 852.4, 2 924.3, 2 963.0 and 3 034.9 cm?1 have been observed in diamond films made by the direct current arc discharge plasma chemical vapor deposition. Three former absorbance peaks have been assigned to C—H stretching in SP3 configuration, 3 034.9 cm?1 has been assigned to C—H stretching in SP2 configuration. The effect of methane concentration and H2 gas flow rate on absorption in the “C—H stretch” range has been investigated. Electron spin resonance analysis indicated that a considerable amount of defects exist in diamond films produced by low pressure chemical vapor deposition.

关 键 词：DIAMOND HYDROGEN IMPURITY CVD FOURIER TRANSFORM infrared spectroscopy (FT-IR). 

分 类 号：P619.28[天文地球—矿床学]