二氧化铪晶态薄膜的自组装制备  

Self-assembled Monolayers Preparation of HfO_2 Thin Film

作　　者：贺中亮[1] 谈国强[1] 苗鸿雁[1] 刘剑[1] 

机构地区：[1]陕西科技大学材料科学与工程学院,西安710021

出　　处：《材料导报》2009年第6期81-83,共3页Materials Reports

基　　金：国家自然科学基金资助项目(50672055);国家科技支撑计划项目(2006BAF02A28);国家自然科学基金资助项目(50872077)

摘　　要：利用自组装单层膜技术,在玻璃基板上生长有机硅烷单分子膜层,以Hf(SO4)2.4H2O和HCl配制HfO2前驱液,通过液相沉积在硅烷的功能性官能团上诱导生成二氧化铪薄膜。通过接触角测试仪、AFM、SEM及XRD等手段对膜材料的表面形貌和结构进行了研究分析。结果表明,利用自组装单层法成功制备出立方型的HfO2晶态薄膜,薄膜表面均一。Monofilm of silane on the surface of the glass substrates is prepared via the method of self-assembled monolayers （SAMs）, Hf（SO4）2· 4H2O and HCl are used as raw materials, HfO2 thin films are prepared on the active groups of the alkyl silane by the liquid phase deposition（LPD）. The surface configuration and structure of the thin films are characterized and analyzed by water contact angle equipment, AFM, SEM and XRD. The results of the characterization indicate that the HfO2 thin films are successfully prepared by the self-assembled monolayers, and the thin films are uniform with a cubic microstructures of HfO2.

关 键 词：薄膜 自组装单层膜 HFO2 

分 类 号：O484.1[理学—固体物理] TQ241[理学—物理]