双声路声表面波毒剂传感器的设计  

Design of dual-path SAW sensors for chemical warfare agents

作　　者：陈传治[1] 马晋毅[2] 左伯莉[1] 江洪敏[2] 

机构地区：[1]防化指挥工程学院,北京102205 [2]中国电子科技集团公司第二十六所,重庆400060

出　　处：《传感器与微系统》2009年第4期91-93,共3页Transducer and Microsystem Technologies

摘　　要：对声表面波(SAW)芯片结构类型、参数条件、覆膜方法及制作工艺流程进行了详细研究,设计了一种新型双声路谐振器型SAW毒剂传感器,并以聚表氯醇PECH为敏感膜材料,测试了该传感器对芥子气(HD)的检测性能,结果表明:该传感器具有稳定性好、灵敏度高、响应快速、适于连续实时检测等特点,为发展毒剂检测器材提供了依据。The SAW configuration type,interdigital transducers configuration, fabrication technology and process, as well as the sensitive material and coating methods, are studied in detail. Using poly epichlorehydrin（PECH） as the sensitive coating for mustard gas（HD） , a novel dual-path SAW resonator gas sensor is designed and tested. The results show that such sensor has merits of good stability, high sensitivity, fast response, suitability for the continunous and real time detection ,which is an ideal gas sensor for chemical warfare agents detection.

关 键 词：声表面波谐振器 双声路 毒剂 气体传感器 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]