长波红外2048元线列碲镉汞焦平面器件  

LONG-WAVE INFRARED 2048-ELEMENTS LINEAR HgCdTe FOCAL PLANE ARRAY

作　　者：李言谨[1] 杨建荣[1] 何力[1] 张勤耀[1] 丁瑞军[1] 方维政[1] 陈新强[1] 魏彦峰[1] 巫艳[1] 陈路[1] 胡晓宁[1] 王建新[1] 倪云芝[1] 唐红兰[1] 王正官[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与毫米波学报》2009年第2期90-92,共3页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金创新群体(60821092)资助项目

摘　　要：介绍了长波红外2048元线列碲镉汞焦平面器件的制备技术和达到的性能参数.探测器采用离子注入平面pn结制备光敏元,通过间接倒焊技术和读出电路互联,采用8个256元焦平面模块拼接2048元线列焦平面器件.光敏元的响应截止波长达到9.9μm,相应的R0A达到10Ωcm2,平均峰值探测率达到9.3×1010cmHz1/2W-1,响应不均匀性为8%,有效光敏元率大于99.5%.The technology and performance of long-wave 2048-elements linear HgCdTe focal plane array were reported. The n-on-p photodiodes were fabricated by planar ion implantation and hybridized with readout circuit by indirect flip chip technique. The 2048-elements linear array consists of 8 segments of 256-element linear arrays that are ＂butted＂ on a single substrate in a staggered format. The cut off wavelength and RoA of the photodiode are 9.9μm and 10Ωcm^2 , respectively. The average detectivity of the 2048-elements linear array is 9.3 × 10^10cmHz^1/2W^-1. The ununiformity of response is 8%. The array peak operability is larger than 99.5%.

关 键 词：长波 长线列 红外焦平面 碲镉汞 

分 类 号：O472[理学—半导体物理]