A novel closed-loop vacuum silicon microgyroscope  

一种新型的闭环真空硅微陀螺仪(英文)

作　　者：夏敦柱[1] 王寿荣[1] 周百令[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《Journal of Southeast University(English Edition)》2009年第1期63-67,共5页东南大学学报（英文版）

基　　金：The National High Technology Research and Development Program of China (863Program)(No.2002AA812038);the National Defense Pre-Research Support Program (No.41308050109)

摘　　要：A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.提出了一种新型的硅微陀螺仪闭环控制策略.所设计的硅微陀螺仪工作在10Pa,采用金属壳CAN封装形式,驱动和检测两模态品质因素高达10000以上,且都采用了基于静电力反馈方法实现闭环.驱动模态采用单边驱动单边检测,尽量使线路简化;检测模态采用双重分解和重构闭环回路.测试结果表明:有用信号和正交信号实现很好的相位解耦,互不影响;在满量程±300(°)/s、标度因素9.6mV/((°).s)的情况下,零偏稳定性已达到28(°)/h;非线性度达到400×10-6;仿真带宽大于100Hz.这较以前设计的仅在空气下工作的硅微陀螺性能提高了近2个数量级.

关 键 词：silicon micro-gyroscope （SMG） self oscillating dual-channel closed-loop detection scale factor zero bias stability 

分 类 号：U666.112[交通运输工程—船舶及航道工程]