表面等离子共振Ag/TiO_2复合膜双光束光强归一化传感器  

Study of surface Plasmon resonance sensor by composite of Ag/TiO_2 film layer using bi-beam normalized light intensity approach

作　　者：符运良[1] 

机构地区：[1]海南师范大学物理与电子工程学院,海南海口571158

出　　处：《激光杂志》2009年第2期68-68,70,共2页Laser Journal

基　　金：海南省自然科学基金资助项目(80690);海南师范大学博士启动基金资助项目(HS200605)

摘　　要：为了克服由于光源光强的波动而导致的表面等离子共振传感器的测量误差,提出一种双光束归一化光强的表面等离子共振检测方法,传感器的结构为金红石材料作成的棱镜作为耦合棱镜,在棱镜的底边采用射频溅射技术制作Ag/TiO2复合膜,Ag膜和TiO2膜的厚度分别为50nm和100nm,在复合膜上设置待测气体的样品池。在He-Ne光入射激励下,复合膜的分界面发生表面等离子共振现象。实验结果表明:采用了双光束归一化光强检测方法,使系统的重复性、稳定性得到大大的提高,减少了测量误差。In this paper, a novel measurement approach of Surface Plasmon Resonance （SPR） with bi - beam was presented in order to reduce the aneasurement error due to the undulation of the light intensity. The configuration of the sensor is a combined film was prepared by RF - reactive - sputtering deposition on mtile prism, and the thieknes of Ag and FiO2 films are 50 nm and 100 nm, respectively, a gas sample eeU was set up on the surface of the combined film. The experiment show that the repeal and stability of the sensor system are greatly improved, and the measurement error is reduced greatly with the application of light intensity difference technology.

关 键 词：表面等离子共振 AG/TIO2 复合膜 双光束检测 共振角 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]