钙钛矿型氧化物透明导电薄膜La:SrTiO_3的制备、结构与物性研究  

TRANSPARENT AND CONDUCTIVE OXIDE FILMS WITH PEROVSKITE-TYPE STRUCTURE:LaSrTiO_3

作　　者：陈乐[1] 刘亲壮[1] 王海峰[1] 高关胤[1] 吴文彬[1] 

机构地区：[1]合肥微尺度物质科学国家实验室,中国科学技术大学,合肥230026

出　　处：《低温物理学报》2009年第2期97-101,共5页Low Temperature Physical Letters

基　　金：国家科技部(项目编号:NKBRSG-G 1999064602);国家自然科学基金(项目编号:10674005;10174003; 90303008)资助的课题~~

摘　　要：本文采用脉冲激光沉积法于不同沉积温度与衬底制备了一系列的La0.05Sr0.95TiO3(LSTO)单晶透明导电薄膜.实验主要研究了高温高氧压条件下沉积的LSTO薄膜的结构及电、光学性质.它们具有良好的外延结构,表现出很好的透明、导电性质.对电阻率拟合发现其导电机制符合电子-电子散射机制.由于制备条件与其它多种钙钛矿型氧化物薄膜一致,可广泛集成应用.用其作为电极所制备的PbZr0.52Ti0.48O3(PZT)外延铁电电容器,具有很好的电滞回线和透光性.Transparent and conductive oxide films with the perovskite-type structure, La0.05Sr0.95TiO3 （ISTO）, have been grown by the pulsed laser deposition method. It was revealed that the films grown at high oxy- gen pressure show high single-crystallinity with the perovskite structure, and remarkably, these films are both electrically conductive and visually transparent in the visible range. The growth parameters are com-patible with those for some other perovskite films, indicating a potential for transparent devices. The LS-TO films have been employed as electrodes for the fabrication of epitaxial PbZr0.52Ti0.48O3 （PZT） ferroe- lectric capacitors, showing square polarization-electric field hysteresis loops , improved fatigue resistance, and good optical transparency.

关 键 词：透明导电薄膜 电阻率 铁电电容器 

分 类 号：O484.1[理学—固体物理]