微细电加工应用技术研究  

Micro Electro Machining Technologies for Industrial Application

作　　者：李勇[1] 

机构地区：[1]清华大学制造工程研究所,北京100084

出　　处：《电加工与模具》2009年第B04期32-37,共6页Electromachining & Mould

基　　金：国家重点基础研究发展计划资助项目(2003CB716204);国家高技术研究发展计划资助项目(2007AA04Z346;2006AA04Z317)

摘　　要：微细电加工要达到工业应用的目的,需兼顾加工效率和加工精度两方面的要求。以微细孔、微细三维结构的加工为目标,进行了微细孔电火花加工、三维微细结构电火花伺服扫描加工及微细电化学加工技术的研究开发。设计出微细电极的损耗补偿进给和导向机构,开发出三维微细结构的电火花伺服扫描加工工艺,研究了采用阵列微细电极的微细电化学加工方法。微细孔电火花加工可连续加工直径小至100μm的孔。伺服扫描电火花加工可便捷地在小于1mm2区域内加工出三维微细结构。提出的微细电化学加工技术路线拟将微细电解加工应用于阵列微细孔和三维微细结构的加工。Micro electro machining technologies including micro-EDM and micro-ECM are devel- oped to drill micro holes and shape 3D micro structures for industrial purposes. An automatic feed mechanism is designed for micro EDM equipment to compensate electrode wear and guide micro elec- trode. A servo scanning EDM method is proposed for shaping 3D micro structures, in which electrode wear is compensated on real time by servo control o{ discharge gap. Then a micro ECM process is also tried to drill array micro holes. Micro holes with minimum diameter of 100/~m can be drilled efficient- ly in the EDM process. 3D micro structures within area of 1 mm2 square can be shaped conveniently by use of the servo scanning EDM process. The micro ECM process proposed will be further studied and used into the machining of array micro holes and 3D micro structures.

关 键 词：微细电火花加工 微细电化学加工 电极损耗 伺服进给 伺服扫描 

分 类 号：TG66[金属学及工艺—金属切削加工及机床]