线列混合型石英微透镜/红外探测器阵列的研究  

Study of the Linear Hybrid Quartz Microlens Array/IR Detectors

作　　者：张新宇[1,2] 易新建[1,2] 赵兴荣 麦志洪[1,2] 何苗 刘鲁勤 

机构地区：[1]华中理工大学光电子工程系 [2]航天部二院25所

出　　处：《中国激光》1998年第2期127-131,共5页Chinese Journal of Lasers

摘　　要：阐述了利用离子束刻蚀技术制作线列长方状拱面石英微透镜阵列的工艺方法，对所制微光学元件的光学性能进行了测试和讨论，所制成的石英微透镜阵列器件在线列ＹＢａ２Ｃｕ３Ｏ７－δ高Ｔｃ超导薄膜红外探测器上得到了应用。实验结果表明，混合型的石英微透镜／红外探测器结构显著改善了线列ＹＢＣＯ高温超导薄膜红外探测器的光响应特性。The technique for preparing a linear rectangular arch microlens array with 20 elements on quartz substrate using Ar ion beam etching has been investigated. The optical performance of the microlens array has been measured. The microlens array was mounted onto a linear  YBa 2Cu 3O 7-δ  high T c superconducting thin film IR detector. The experimental results show that the optical response performance with hybird structure of microlens and IR detector array can be remarkably improved.

关 键 词：离子束刻蚀 微透镜阵列 YBCO 红外探测器 

分 类 号：TN215[电子电信—物理电子学] TN256