CVD法合成的无定型纳米粉体的晶化  

CRYSTATLLIZATION OF AMORPHOUS NANO-POWDERS SYNTHESIZED BY CVD METHOD

作　　者：陆忠乾[1] 江东亮[1] 谭寿洪[1] 严东生[1] 

机构地区：[1]中国科学院上海硅酸盐研究所

出　　处：《硅酸盐学报》1998年第1期118-123,共6页Journal of The Chinese Ceramic Society

基　　金：国家攀登计划A-"纳米材料科学"资助项目

摘　　要：以六甲基二硅氨烷（ＨＭＤＳ）为原料，采用ＣＶＤ方法，在不同温度下合成的粉体，经ＸＲＤ测定，确定为无定型．经不同温度晶化处理后，发现１０００℃时合成粉体随着晶化温度的提高，颗粒长大并变长，接近哑铃状．经１５００℃晶化处理后，颗粒呈晶须状，而经１６００℃处理后才完全晶化．１４００℃合成的粉体则随着晶化处理温度的提高，局部的颗粒长大，温度愈高，长大的颗粒愈多．经１５００℃晶化处理后，从ＸＲＤ，ＴＥＭ及ＨＲＥＭ可以看出粉体全部晶化，颗粒的结晶已非常完整，晶格网络清晰可见，颗粒度约为２０—４０ｎｍ，外表面有一层１—２ｎｍ的膜包裹．The CVD synthesized amorphous nano_powder with hexamethyl disilazane [(Si(CH 3) 3) 2NH] as the raw material is crystallized at different temperatures. With the increase of crystallization temperature,the powder particles become larger at 1000℃, forming some dumbbell shaped particles. As the crystallization temperature reaches 1500℃, the powder particles will change to whiskers. At 1600℃, crystallization can be performed completely. For the amorphous powder synthesized at 1400℃, as the crystallization temperature increases, particle growth will occur partly, and the higher the crystallization temperature, the more the particles occurred. When the crystallization temperature reaches 1500℃, the completely crystallized powder is obtained, and a very thin amorphous film of about 1—2nm exists on the particle surface. The particle size is about 20—40nm, and the distribution is relatively narrow.

关 键 词：化学气相沉积法 晶化 无定型 纳米材料 陶瓷 

分 类 号：TQ174.6[化学工程—陶瓷工业]