PLD制备DLC的研究进展  

Advance of Research Work in DLC Films Fabricated by PLD

作　　者：张金平[1] 

机构地区：[1]西华师范大学,南充637002

出　　处：《重庆科技学院学报（自然科学版）》2009年第3期153-158,175,共7页Journal of Chongqing University of Science and Technology：Natural Sciences Edition

摘　　要：介绍了DLC薄膜优良的特性及应用,阐述了脉冲激光沉积(PLD)方法的工作原理及其优缺点,设计了制备DLC的PLD装置,分析了国内外用PLD制备DLC超硬薄膜的现状和发展方向。The article introduces the excellent characteristics and application of Diamond-like Carbon （DLC） films, and the operating principle, advantage and disadvantage of Pulsed Laser Deposition （PLD）. The progression and tendency at home and abroad of DLC fabricated by PLD are represented in this paper.

关 键 词：脉冲激光沉积 类金刚石薄膜 超快脉冲激光 

分 类 号：O484[理学—固体物理] O766[理学—物理]