硅微机械陀螺仪模拟信号检测技术研究  

Research on Analog Signal Detecting of Silicon Micro-Machined Gyroscope

作　　者：钟舟[1] 黄丽斌[1] 杨波[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《传感技术学报》2009年第4期495-498,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(40804015);面向惯性重力组合导航的海洋重力信息处理方法研究基金资助(200802861060);硅微陀螺仪的芯片级温控技术研究基金资助(200802861063);总装备部"十一五"预研课题资助(6922002055)

摘　　要：在陀螺测控中,信号的检测电路具有非常重要的地位,其性能直接影响着陀螺的精度。分析了几种微机械陀螺仪的模拟信号检测技术,指出了其中的不足。设计了一种针对硅微机械陀螺仪的信号检测电路,给出了设计方案的原理框图,详细分析了方案中重要环节的设计思路。电路与敏感结构进行了连接和实验。实验结果验证了设计方案的有效性。The signal detecting circuit has a very vital position in the measurement and control of gyroscope as it has a direct impact on the performance of the gyroscope. Current analog signal detecting technology of the micro-machined gyroscope is discussed. The problems and disadvantages are pointed out. A signal detecting circuit for silicon micro-machined gyroscope is put forward. The block diagram of the design approach is presented and the vital aspect of the scheme is analyzed in detail. The circuit and the sense structure are linked and tested. Experimental result illustrates that the proposed scheme in this paper is feasible.

关 键 词：微机械陀螺仪 信号检测 同步解调 带通 载波 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]