电镜样品的激光镀膜技术  

A Technology for Plating Carbon Film on Electron Microscopy Sample Surface by Pules Laser

作　　者：汪霖[1] 吴剑钟[1] 杜金潮 张慧明[1] 

机构地区：[1]杭州大学中心实验室

出　　处：《杭州大学学报（自然科学版）》1998年第2期54-57,共4页Journal of Hangzhou University Natural Science Edition

摘　　要：非导电的样品用扫描电镜进行观测时需要对样品进行镀膜处理以获得清晰的图像，本文介绍应用脉冲激光沉积（ＰＬＤ）技术对非导电样品的表面进行镀膜处理的方法和实验装置及实验结果．A nonconducted sample is observed clearly by electron microscorpy, the sample have to be plated a conducted film. In this paper, the technology of pulesed laser diposition (PLD) to plate a carbon film on Electron Microscopy Sample surface is proposed, then the experimant device is discribed and the experiment results are discussed.

关 键 词：脉冲激光沉积 石墨靶 镀膜 电镜 薄膜 

分 类 号：O484.1[理学—固体物理]