C-90%SiC涂层加热处理前后形貌特征及其阻氢性能的研究  

On the morphology and hydrogen resistance of C-90%SiC coatings before and after heating

作　　者：曾俊辉[1] 杜良[1] 张东[1] 杜纪富[2] 杨淑勤[2] 张瑞谦[2] 任丁[2] 黄宁康[2] 

机构地区：[1]中国工程物理研究院核物理与化学研究所,四川绵阳621900 [2]四川大学原子核科学技术研究所,四川成都610064

出　　处：《真空》2009年第3期27-30,共4页Vacuum

摘　　要：对离子束混合技术在不锈钢基体上沉积C-90%SiC涂层进行不同温度的加热处理及H+注入。对加热处理前后H+注入涂层表面进行了SEM的观察,研究涂层表面加热处理前后鼓泡数量及分布的变化。通过AFM分析,研究涂层内沉积颗粒大小、形状以及分布与加热处理温度的关系。通过SEM-EDAX测量,研究涂层内组元分布的变化。涂层的H+注入的二次离子深度分布测量表明,试样经加热处理后,涂层的阻氢能力得到进一步的提高。The C-90% SiC coating deposited on stainless steel substrate by ion beam mixing process was heated and H＋ implanted. Observing the morphologies of the samples by SEM before and after heating, the number and distribution of the bubbles on the coating surface were studied. AFM was used to investigate the relationship between the size and shape of particles and distrbution on the coating surface and the heating temperature. SEM-EDAX was used to show the changes in the composition of the coating through heating. And the secondary profile of hydrogen depth for the C-90 % SiC coating by SIMS measurement showed that the hydrogen resistance of the C-90 % SiC coatings can be effectively improved after heating.

关 键 词：C-90%SiC涂层 SEM AFM 阻氢性能 

分 类 号：TL93[核科学技术—辐射防护及环境保护]