He-Ne激光管的失效机理研究  

Study of the Failure Mechanisms of He-Ne Laser

作　　者：周敬召[1] 石顺祥[1] 刘继芳[1] 

机构地区：[1]西安电子科技大学技术物理学院,陕西西安710071

出　　处：《电子科技》2009年第5期47-49,58,共4页Electronic Science and Technology

基　　金：国防重点实验室基金资助项目(J1440505103)

摘　　要：从He-Ne激光管组成工艺和内部器件出发,详细分析了影响He-Ne激光管寿命的各种因素,指出对He-Ne激光管寿命影响最为重要的因素,是阴极溅射和反射镜的污染及损伤。并分析了造成反射镜受污染及损伤的主要原因。在只考虑镜膜表面逐渐变粗糙影响的情况下,文中根据基尔霍夫衍射积分公式导出了正入射时粗糙表面的反射率公式。The He-Ne laser tube technology and internal components of the device are introduced. A detailed analysis of the contributing factors to He-Ne laser tube life is made. It is pointed out that an important factor is the pollution and damage of the cathode sputtering and reflection mirror. The major reasons for the mirror＇s pollution and damage are analyzed. With only the effect of the mirror surface gradually becoming rough considered, this paper derives the reflectivity formula of the rough surface in the case of normal incident based on the Kirchhoff diffraction integral formula.

关 键 词：氦氖激光管 失效机制 阴极溅射 反射镜的污染 

分 类 号：TN248.2[电子电信—物理电子学]