相移雅满横向剪切干涉仪  

Phase Shifting Jamin Lateral Shearing Interferometer

作　　者：王利娟[1] 刘立人[1] 栾竹[1] 孙建锋[1] 周煜[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2009年第5期1156-1159,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金(60807024)资助课题

摘　　要：雅满横向剪切干涉仪是一种很重要的波面枪测仪器,特别是可以对白光的波面进行检测。为了弥补传统雅满横向剪切十涉仪的不足,提出了一种相移雅满横向剪切十涉仪。它是在雅满横向剪切干涉光路中插入起偏器,1/4波片和检偏器所形成,实现了剪切干涉与相移的结合,能有效地提高测量精度,可适用于白光的波面检测,结构简单且操作方便。实验中通过旋转检偏器获得了相移下涉图,其结果很好地验证了该相移雅满横向剪切十涉仪的有效性。Jamin lateral shearing interferometer is very useful in wavefront measurement, especially for the white light. To improve the performance, a phase shifting Jamin lateral shearing interferometer is proposed. The interferometer is formed by inserting polarizers, a quarter-wave plate and an analyzer in the Jamin lateral shearing interferometer. The shearing interference is combined with the phase shifting with a simple configuration. With phase shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system. It still suits the wavefront measurement of the white light. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.

关 键 词：光学器件 横向剪切干涉仪 相移 波面检测 

分 类 号：TH744.3[机械工程—光学工程]