磁控溅射TiC/a-C薄膜的结构和摩擦学性能研究  

Microstructures and Tribological Properties of TiC/a-C Films Grown by Magnetron Sputtering

作　　者：张文艳[1] 张旭海[1] 方峰[1] 蒋建清[1] 

机构地区：[1]东南大学江苏省先进金属材料高技术重点实验室,南京211189

出　　处：《真空科学与技术学报》2009年第3期282-286,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家973计划资助项目(No.2007CB616903);张家港市科技攻关项目(No.2JG200609)

摘　　要：采用磁控溅射法制备不同碳含量的碳化钛薄膜。采用SEM、XRD及HR-TEM等手段分析了TiC/a-C薄膜的微观组织结构,采用摩擦磨损仪和台阶仪研究了薄膜的摩擦学性能。研究结果表明,碳含量在40%～74%时,随碳含量的增加,薄膜结构由疏松变得致密,(111)择优取向逐渐转变为无明显择优取向生长。当碳含量为60%时,薄膜结构为TiC晶粒镶嵌在非晶碳基体中的纳米复合结构,此时薄膜的机械性能及耐磨性最佳。磨损机制主要为粘着磨损和磨粒磨损,通过调节薄膜中非晶碳的含量及晶粒大小并增加薄膜的硬度可改善其摩擦学性能。The titanium carbide films with varying carbon contents were deposited by magnetron sputtering. The microstmctures and tribological properties of the films were characterized with X-ray diffraction （XRD）, high resolution transmission electron microscopy （HR-TEM） and conventional mechanical probes. The results show that the carbon contents strongly affect the microstructures and mechanical properties of the films. As the C atomic concentration increases 40% to 74%, the film compactness considerably improves; and the （111 ） preferential growth orientation changes into a random one. At 60% of C, the composite film with crystalline TiC nano-particles embedded in amorphous carbon matrix, display the best mechanical properties and the highest wear-resistance, originating from the adhesive and abrasive wears. We suggest that the tribelogical properties could be further improved by controlling the nano-grain sizes, amorphous C contents and microhardness of the films.

关 键 词：TiC/a-C薄膜 磁控溅射 碳含量 微结构 摩擦性能 

分 类 号：TB43[一般工业技术]