传输线脉冲发生器电压探测中振荡问题的研究  

Study on the Oscillation Problem of Voltage Probing in Transmission Line Pulsing Generator System

作　　者：曾传滨[1] 李晶[1] 王显泰[1] 海潮和[1] 韩郑生[1] 

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《半导体技术》2009年第4期365-369,共5页Semiconductor Technology

摘　　要：对传输线脉冲发生器电压探测中的振荡问题进行了研究。通过减小电压探头的寄生电感克服了振铃问题,通过缩短电压探头和待测器件之间的传输段传输线长度降低了探头处实际承受的上冲电压,从而有效地抑制了传输线脉冲发生器电压探测中的振荡问题,提高了测试的准确性,并在国内率先制造出了波形质量达到国际先进水平的传输线脉冲发生器。The oscillation problem wad studied. The tinging problem was of voltage probing in transmission line pulsing （TLP） generator system suppressed by decreasing the parasitic inductance of voltage probe ground lead, and the actual overshoot voltage was reduced by shortening the length of transmission line between the voltage probe and the DUT. Therefore, the oscillation problem of voltage probe in TLP generator system was suppressed effectively and the test reliability of the TLP system is increased. Besides, a set of TLP generator system with excellent waveform was developed.

关 键 词：静电放电 传输线脉冲发生器 振铃 上冲 电压探测 电压波形 

分 类 号：TN406[电子电信—微电子学与固体电子学]