静电梳状硅微单侧直脚谐振器的力学性能  

Mechanical Performance of Micro One-sided Straight-leg Beam Resonator

作　　者：沈雪瑾[1] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072

出　　处：《机械工程学报》2009年第5期49-56,共8页Journal of Mechanical Engineering

基　　金：国家自然科学基金重点资助项目(50135040)

摘　　要：建立单侧支撑直脚型静电梳状硅微谐振器的三次超静定简化力学模型,给出该模型中谐振频率、弹性系数和横向最大位移的计算公式。与五次超静定系统的双侧支撑直脚型静电梳状硅微谐振器的各力学性能参数的计算公式对比发现它们有显著差别。分析表明,与双侧支撑直脚型静电梳状硅微谐振器显著不同,单侧支撑直脚型静电梳状硅微谐振器的谐振频率、弹性系数、横向最大位移会随两根支撑梁的间距变化而改变,并当此间距超过某一值后,上述三变量的变化均很小且趋向于一定值。同样,后者的谐振频率会随支撑梁厚度的变化而单调改变,这也是前者所没有的现象。为此从两者因为超静定次数不同而约束冗余度不同的角度,对此现象进行了物理意义上的解释。经与试验结果对比,单侧支撑直脚型静电梳状硅微谐振器横向谐振频率的理论值与实测值吻合较好,最大误差为12.07%。The lateral vibration of microresonator suspended with one-side straight-leg beams is simple modeled in a superfluous system with three unknown variables. Methods are given to calculate the resonant frequency, elastic coefficient and lateral displacement. Comparing with the microresonator suspended with double-side straight-leg beams that is a superfluous system with five unknown variables, it is found that the mechanical properties of the former are quite different with that of later. It is clearly different from the microresonator suspended with double-side straight-leg beams from the analysis results that the resonant frequency, elastic coefficient and lateral displacement will change with the variation of distance between the two straight-leg beams in microresonator suspended with one-side straight-leg beams. After the distance exceeds a certain value, the change of all the above three variables is very small and tends to a fixed number. Similarly, the resonant frequency also will change with the variation of beam thickness in later, but there is no such phenomenon in the former. So an explanation is given according to the different redundance for the two different superfluous systems. The theoretical resonant frequencies of microresonators suspended with one-side straight-leg beams are coincident with the measured values. The biggest error between them is 12.07%. The above results provide reference for the structure design of microresonator.

关 键 词：微型机电系统 静电硅微谐振器 单侧支撑 性能分析 

分 类 号：TH112[机械工程—机械设计及理论] TN305[电子电信—物理电子学]