校内实验室开设微电子生产实习的探索  

Exploration for Microelectronics Production Exercitation in Intramural Laboratory

作　　者：王蔚[1] 田丽[1] 王喜莲[1] 刘晓为[1] 

机构地区：[1]哈尔滨工业大学航天学院微电子系,黑龙江哈尔滨150001

出　　处：《电气电子教学学报》2009年第2期71-72,共2页Journal of Electrical and Electronic Education

摘　　要：微电子芯片生产的"超净"限制了学生在大企业芯片生产线上的实习机会。为此,我校在校内实验室建立了微电子平面工艺线,为学生开设生产实习。在教师指导下,学生动手进行晶体管制作的全部工艺操作和测试。为使学生对实际工业化生产方式和生产过程有所了解,我们对教学内容进行合理安排,生产实习前增设了认识实习。实践证明,校内生产实习有助于学生实践能力的培养和综合素质的提高。The fabrication of microelectronics chip must be in a very clean environmment, so the production exercitation in the corporation product line is limited for the undergraduates in microelectronics specialty. This problem hsa been solved in our school. A plane technical product line is set up in the intramural labo- ratory for the students＂ production exercitation. With the teachers＂ guidance, the students fabricate the transistors and test them by themselves. In order to make students understand the actual industrialization production mode and process and to arrange the teaching content reasonably, the fieldwork cognition part is added before production exercitation. It is proved that production exercitation in the intramural laboratory is helpful to cultivate the students practice capabilities and to improve the overall quality.

关 键 词：生产实习 微电子实验室 

分 类 号：O47[理学—半导体物理]