离子溅射镀膜对纳米材料形貌观察的影响  

Effect of Coating by Ion Sputtering on Observation of Nanometer Materials Morphology

作　　者：李昌明[1] 范海陆[1] 尹荔松[1] 

机构地区：[1]五邑大学数理系,广东江门529020

出　　处：《五邑大学学报（自然科学版）》2009年第2期23-25,共3页Journal of Wuyi University(Natural Science Edition)

摘　　要：通过观察场发射扫描电子显微镜下纳米Cu颗粒离子溅射镀膜前后纳米尺度的形貌,发现镀膜改变了纳米Cu颗粒的形貌,分析了离子溅射膜的形成过程,探讨了镀膜改变纳米颗粒形貌的原因,指出了观察纳米颗粒形貌时应该注意的问题.The micro-morphology of the nano-copper particles with/without coating by ion sputtering was observed and investigated by using Field Emission Scanning Electron Microscope （FESEM）. The results obtained demonstrate that the micro-morphology of the nano-copper particles was changed. The film coating formation process was analyzed and the reason why the micro-morphology of nano-particles changed was discussed. Finally, points for attention were put forward for observing the morphology of nano-particles.

关 键 词：纳米材料 离子溅射 镀膜 形貌改变 

分 类 号：O657.32[理学—分析化学]