RF-PCVD法制备TiO2纳米微晶动力学分析  

Kinetics analysis preparation of TiO_2 nano-microcrystals by RF-Plasma CVD

作　　者：王俊文[1] 孙彦平[1] 陈新谋 

机构地区：[1]太原理工大学洁净化工研究所,山西太原030024 [2]石家庄开发区新谋新科技有限公司,河北石家庄050091

出　　处：《材料科学与工艺》2009年第2期199-202,207,共5页Materials Science and Technology

基　　金：山西省青年科技基金(20051009);山西省归国留学人员基金(2004-23);山西省专利推广实施项目(2006-05)

摘　　要：本文分析了以TiCl4+O2为反应体系的RF-PCVD反应器内TiO2气相反应、成核和粒子长大过程.采用分子动力论中的Brownian碰撞理论,经合理简化,建立了粒子长大的动力学模型,该数模为一非线性一阶微分方程,描述TiO2微晶长大的速率.模型表明:粒子的长大速率与温度的1/2次方、TiO2的浓度成正比,与粒径的3/2方成反比;故体系中存在长大过程的自约束现象.在实验条件下,根据粒子长大数模的计算值与实验结果相接近.The formation process was analyzed for TiOz nano -microcrystals produced by radio -frequency plasma chemical vapor deposition method （ RF - PCVD） within the titanium tetrachloride and oxygen system, which includes high - temperature chemical reaction, nucleation and particle growth processes. Under the conditions of rational assumptions, the particle growth model was developed on the basis of Brownian collision theory. The analysis shows that the growth speed of nano - particle is related to temperature and concentration of TiO2 as well as the diameter of particle. The growth process is self-restricted in the formation system. The cal- culated results of the model are in primary agreement with experimental results.

关 键 词：高频等离子体 化学气相沉积 纳米粉体 二氧化钛 动力学 

分 类 号：O211.6[理学—概率论与数理统计] TG146.23[理学—数学]