微悬臂梁矩阵细胞牵引力测量传感器研制  

Microcantilever Matrix Sensor Fabrication for Cell Traction Force Measurement

作　　者：周治国[1] 刘志文[1] 范哲意[1] 

机构地区：[1]北京理工大学电子工程系,北京100081

出　　处：《传感技术学报》2009年第5期627-631,共5页Chinese Journal of Sensors and Actuators

基　　金：留学基金委联合培养博士生专项基金资助(2007104835)

摘　　要：提出一种采用聚碳酸酯核孔膜为模版来制作高深宽比聚二甲基硅氧烷微悬臂梁矩阵的新方法,用来作为生物微机电系统传感器探测细胞微纳力学及在体外研究细胞的机械特性,并对其制作工艺进行研究。通过选择不同的膜,可以便捷制作不同规格的微悬臂梁矩阵来满足不同精度的测量需求。细胞贴附在经表面处理后的微悬臂梁矩阵顶端生长并延展迁移,造成微悬臂梁弯曲形变。通过对形变共焦荧光显微图像处理,可以精确描绘出细胞牵引力分布。实验结果表明该制作方法有效,测量精度达到nN/μm。A new method to fabricate high-aspect-ratio Polydimethylsiloxane （PDMS） microcantilever matrix using polycarbonate track-etched （PCTE） membranes as templates is proposed and the fabrication process is studied. The high-aspect-ratio microcantilever matrix serves as Biological Micro-Electromechanical Systems （BioMEMS） sensors for detecting cellular nano/microforces and studying in vitro cell mechanics. By choosing appropriate membranes different lengths and diameters of the microcantilevers and the densities of the microcantilever matrixes can be fabricated to afford different precision requirement. After surface treatment, closely spaced vertical microcantilever matrix was designed to encourage cells to attach and spread across multiple microcantilevers, and to bend the microcantilevers as the cells locomote on the top surface. By processing the eonfocal fluorescence microscopy images of the deformations of microcantilevers, we can depict the cell traction force map. The experiment results show that the method is effective and the measurement resolution can reach in nN/μm scale.

关 键 词：细胞牵引力测量 生物微机电系统 模板法 聚二甲基硅氧烷 聚碳酸酯核孔膜 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]