一种基于MEMS微硅多狭缝分光光度计  

A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

作　　者：郝鹏[1,2] 吴一辉[1] 张平[1] 刘永顺[1] 张科[1,2] 黎海文[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光谱学与光谱分析》2009年第6期1713-1716,共4页Spectroscopy and Spectral Analysis

基　　金：国家“863”计划项目(2006AA04Z358);国家自然科学基金项目(60574089)资助

摘　　要：研制出了一种采用后分光技术,微硅片多狭缝进行像元分割,硅光电二极管阵列为探测器的微型分光光度计。分析了光谱带宽对测试得到的溶液吸光度线性相关性的影响,讨论了分光前后狭缝宽度与分光光度计光谱带宽之间的关系,为分光光度计前后狭缝的设计提供了理论依据。采用MEMS(微机电系统)工艺制造出了体积小、精度高、厚度薄的一体式微硅片狭缝,并将其应用于分光光度计中。采用此分光光度计对线性吸光度溶液进行测试,结果表明线性相关系数大于0.999,说明所研制的采用微硅片狭缝的分光光度计具有高度线性相关性。A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer＇s slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this speetrophotorneter. The final result showed that the correlation coefficients were larger than 0. 999, which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.

关 键 词：微硅狭缝 微型分光光度计 微光机电系统 光谱带宽 

分 类 号：TH744.1[机械工程—光学工程] O433.1[机械工程—仪器科学与技术]