基于恒温法的热膜式气体流量传感器的设计  

Design of hot-film air flow sensor based on method of constant temperature

作　　者：蔡春丽[1] 刘志远[1] 王惠玲[1] 于海超[1] 王洪岩[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2009年第6期104-106,109,共4页Transducer and Microsystem Technologies

摘　　要：设计了一种新的基于恒温法的热膜式气体流量传感器,介绍了该传感器的建模过程及其敏感元件的结构设计,并给出了流量传感器的详细设计方案。仿真和实测结果表明:该流量传感器既能对小流量信号敏感又能准确地反映大流量的输出,功耗低于0.1W,响应时间小于50m s,精度可达到0.6%FS,能够满足低功耗、快响应、高精度等性能技术指标的要求。Based on the method of constant temperature, a type of new hot-film gas flow sensor is designed. The process of modeling and the structural design of its sensitive components are introduced, and the detailed design of the sensor is given. Simulation and experimental results show that the flow sensor is either sensitive to small traffic signal or fit for the measurement of large traffic signal, whose power comsumption approaches 0.1 W, response time is less than 50 ms, accuracy is 0.6 % FS, and can satisfy the technical specification request, such as low-power consumption, fast response, high accuracy etc.

关 键 词：传感器 气体流量 热膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]