多功能微波等离子体教学研究装置的研制  

Development of multifunctional microwave plasma teaching and investigation device

作　　者：张磊[1] 侯想[1] 胥明[1] 夏明荣 马志斌[1] 

机构地区：[1]武汉工程大学等离子体化学与新材料省重点实验室,湖北武汉430074 [2]杭州大华仪器制造有限公司,浙江杭州311400

出　　处：《大学物理》2009年第6期33-35,39,共4页College Physics

基　　金："十一五"国家级教学研究项目(FIB070335-A6-07)资助;湖北省教育厅教学研究项目(20060270)资助

摘　　要：针对目前国内等离子体技术的教学和研究远远落后于工程应用的实际情况,开发了多功能微波等离子体教学研究装置.该装置利用频率2.45GHz的微波激励稀薄气体放电,形成轴对称的等离子体球,产生的等离子体无内部电极,可避免放电污染.同时通过微波技术、真空技术、冷却技术的集成,使该装置结构紧凑、性能稳定、性价比较高.利用该装置进行了金刚石薄膜沉积与离子体诊断实验,效果良好.Multi-functional microwave plasma teaching and investigative device are developed for the colossal distance between teaching investigation and application of plasma technology. The frequency 2.45 GHz microwave incentive rarefied gas discharge is used to form axisymmetric plasma. Plasma without the internal electrode can a- void discharge pollution. Microwave, vacuum and cooling technologies have been integrated in the device, so it is stability and cost-effective. The equipment has been used for the experiments of diamond films deposition and plas- ma diagnosis, and the results are very well.

关 键 词：微波等离子体 金刚石膜沉积 离子体诊断 

分 类 号：O4-33[理学—物理]