镀膜元件面形变化的时间效应和湿度效应  

Aging and humidity effects of optical surface deformation after deposition

作　　者：祝沛[1] 沈卫星[1] 陈卫华[1] 张伟[1] 

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海201800

出　　处：《强激光与粒子束》2009年第6期851-854,共4页High Power Laser and Particle Beams

摘　　要：对镀制强激光薄膜的光学元件在外界环境中时,表面面形发生的变化进行了研究。理论分析了表面面形的变化机制,明确水致应力具有物理和化学两种形成机制,是改变镀膜元件面形的主要因素;实验研究了镀制激光高反膜的K9材料元件存放过程中面形变化趋势,发现这种趋势变化具有时间效应和湿度效应。To study the deformation of optical surface when optical components deposited with high power laser films are exposed to room air, theoretical analysis was carried out to make clear that water-induced stress is and it is the main reason to cause such optical surface deformation including two formation mechanism： physical mechanism and chemical mechanism. A series of experiments were designed to investigate the transformation tendency of film stress, and the deformation was found with aging effect and humidity effect during storage. Which corresponding to the chemical mechanism and physical mechanism respectively.

关 键 词：薄膜 水致应力 面形 时间效应 湿度效应 

分 类 号：O484[理学—固体物理]