质子辐照对极紫外波段滤光片透过率的影响  

Effect of proton irradiation on transmittance of Al filter at EUV waveband

作　　者：范鲜红[1,2] 陈波[1] 关庆丰[3] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,130033 [2]中国科学院研究生院 [3]江苏大学材料学院,江苏镇江212013

出　　处：《强激光与粒子束》2009年第6期931-935,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(40774098,50671042)

摘　　要：为了检验应用在极紫外波段空间太阳望远镜上Al滤光片在空间辐照环境下透过率的变化情况,用能量100keV,剂量为6×1011/mm2的质子束对其进行辐照,利用透射电子显微镜分析了质子辐照前后滤光片的微观结构。实验结果表明:由于质子辐照使滤光片受质子侵蚀后,Al原子被击出发生质量损失,表面形态发生了变化,造成滤光片变薄,从而导致透过率由辐照前的12.1%增大到15.0%,且滤光片的薄厚分布不均匀使透过率曲线出现了次级峰,造成其光学性能的退化。Part of low-earth orbit＇s space radiation environment was simulated to investigate the influence on the transmittance change of the aluminum filter used on the space solar telescope in extreme-ultraviolet（EUV） waveband. The transmittance was measured before and after proton irradiation with energy of 100 keV and dose of 6×10^11/mm^2. And the microstructures of a luminum filter were investigated by transmission electron microscopy（TEM）. The experimental results show that the transmittance of filter increases from 12.1% to 15.0 % because of the thickness decrease of filter after proton irradiation, and the thickness of the filter beoames inhomogeneous, resulting in the optical performance degradation of the filter and sub-peak in the transmit tance curve. The reason is that aluminum atoms are stricken out and the filter surface configuration changes when the filter is corroded by proton irradiation.

关 键 词：质子辐照 滤光片 透过率 极紫外波段 

分 类 号：O434.14[机械工程—光学工程]