硅镜轻量化结构优化与实现  

Optimization and implementation for lightweight structure of Sic mirror

作　　者：张云电[1] 管成成[1] 余芳[1] 

机构地区：[1]杭州电子科技大学机械工程学院,浙江杭州310018

出　　处：《机电工程》2009年第6期28-30,67,共4页Journal of Mechanical & Electrical Engineering

基　　金：浙江省自然科学重点基金资助项目(Z105528)

摘　　要：为了保证在高的面形精度的前提下尽可能地降低硅镜的质量,通过对多种轻量化结构的分析与对比,确定了具体轻量化结构形式并对其进行了优化设计。通过计算机仿真分析证明了该优化设计方案的可行性,并采用超声加工方法实现了硅镜轻量化加工。试验结果表明:轻量化加工的硅镜镜体质量明显降低;虽然镜面精度有所降低,但仍能满足光学系统的设计要求。In order to reduce the weight of silicon mirror as much as possible under the premise of the high-precision of the surface,on the basis of analysis and comparison of a variety of light-holes, a specific structure was determined and its design was optimized. With computer simulation analysis, the design of optimization was proved to be feasible and it was implemented by the approach of ultrasonic machining. The results show that the weight of the Sic mirror is significantly reduced. Although the precision of surface lower slightly, it can be able to meet the design requirements of optical systems. It shows that optimization of the design is effective.

关 键 词：硅镜 轻量化结构 优化设计 超声加工 

分 类 号：TB559[理学—物理]