UV-LIGA技术在微型模具型腔加工中的应用研究  

Fabrication of microchannel cavity using a modified UV-LIGA process

作　　者：庄俭[1] 于同敏[1] 王敏杰[1] 杜立群[2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024 [2]大连理工大学微系统研究中心,辽宁大连116024

出　　处：《哈尔滨工业大学学报》2009年第5期106-109,共4页Journal of Harbin Institute of Technology

基　　金："十一五"国家科技支撑计划重点项目(2006BAF04B13);中国博士后科学基金项目(20080440301)

摘　　要：为了实现微小注射模具型腔的精密加工,针对微小尺度模具型腔的加工难点,通过改良常规UV-LIGA工艺技术,选用合适的基底材料5CrNiMo,采用在基底表面上直接进行电铸生长的无背板生长方法,加工出具有50μm和100μm特征尺寸的哑铃型塑件微型腔.研究结果表明,无背板方法可实现在钢基底表面上直接通过电铸工艺获得微型模具型腔,省去了电铸背板步骤,既简化了工艺过程、缩短了整个工艺的制造周期,又增强了铸层与基底的结合力,可大大提高模具的形状精度.Abstract： In order to realize the precise fabrication of micro injection mold, the proper substrate material of 5CrNiMo was selected to deal with the difficulty in machining microscale mold cavity. A modified UV-LIGA technology called no-back-plate-growth method was employed, in which the nickel layer was directly electroformed on the steel substrate. Using this method, the dumbbell-shaped cavities with the characteristic dimensions of 50 μm and 100 μm were obtained successfully. The researches show that the no-back-plate-growth method can be used to obtain micro mold cavity through the directly electroforming process on the steel substrate. It can be suggested that this method simplifies the manufacturing cycle, the adhesion between coating and substrate is enhanced, and the shape accuracy of mold is greatly improved.

关 键 词：UV—LIGA技术 微细加工技术 微注射成型 微流道型腔 

分 类 号：TG76[金属学及工艺—刀具与模具] TQ320[化学工程—合成树脂塑料工业]