多波段激光滤光膜的研制  

Study and Fabrication of Multi-Band Laser Filter Film

作　　者：贺才美[1] 付秀华[1] 孙钰林[1] 李美萱[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《中国激光》2009年第6期1550-1554,共5页Chinese Journal of Lasers

摘　　要：针对光学仪器对多光谱光轴测试的特殊要求,采用电子束真空镀膜的方法并加以离子辅助沉积系统,通过对材料的光学特性、膜系设计和监控厚度误差的分析,优化工艺参数,在多光谱ZnS基底上,成功镀制多波段激光滤光膜,实现了多波段光谱的分束。所镀膜层在30。角入射条件下,可见400～700 nm波长范围内平均透射率高于90%,1064 nm和1 540 nm波长处的透射率都低于5%,在红外波长10.6μm透射率高于92%,并且解决了膜层牢固性问题,能够承受激光光源的照射和恶劣的环境测试,完全满足光学仪器的使用要求。In order to meet the optical instruments＇ special demands for multi-spectral optical axis testing, we adopt electronic beaming vacuum depositing method with the aid of ion assistant deposition systems. Through analyzing the optical characters of coating material, film designing, monitoring thickness error, and optimizing technical parameters, we deposit multi-band laser filter film on the substrate of ZnS to achieve beam split of multi-band spectrum. In condition of 30° incident angle on both coating surface, the average transmittance exceeds 90 % through 400-700 nm wavelength. Moreover, it makes the transmittance over 92% in 10.6 μm, below 5% in wavelength 1064 nm and 1540 nm. In addition, our experiment improves the adhesion of the film. It can resist laser beams and conform to environmental stability standards, completely meet the demands of optical instruments.

关 键 词：薄膜 激光滤光膜 真空镀膜 离子辅助沉积 光学特性 

分 类 号：O484.1[理学—固体物理]