Gires-Tournois负色散镜误差分析  

Error Analysis of Gires-Tournois Negative Dispersion Mirrors

作　　者：王胭脂[1,2] 邵建达[1] 晋云霞[1] 黄建兵[1] 张伟丽[1] 董洪成[1,2] 贺洪波[1] 范正修[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800 [2]中国科学院研究生院,北京100039

出　　处：《中国激光》2009年第6期1563-1568,共6页Chinese Journal of Lasers

摘　　要：负色散镜的色散补偿性能对设计和制备的精度要求都非常高,折射率和薄膜物理厚度是其性能准确实现的必要参数。实验设计并镀制了Gires-Tournois(G-T)镜,结合电场强度分布及薄膜的群延迟色散(GDD)、扫描电镜的测量结果,从材料折射率、膜层厚度、敏感膜层的变化及界面粗糙度等主要因素对Gires-Tournois镜群延迟色散性能的影响进行了分析。研究表明:设计时采用的材料折射率要根据实际实验计算得到;群延迟色散量随着总的膜层厚度和腔的厚度增加而增加;电场强度的分布决定色散补偿能力及敏感膜层的位置,最薄的膜层不一定是最敏感的膜层,敏感膜层对沉积厚度控制精度要求非常高;薄膜的界面粗糙度和不均匀性也是误差产生的重要原因。The compensation of negative-dispersion mirrors has very high request on design and preparation. The refractive index and physical thickness are the necessary parameters for the realization of the capability. Negativedispersion mirrors are designed and prepared, which are analyzed from the main factors such as material refractive index, thickness, the sensitive layers and interface roughness considering the electric field distribution and the measurement result of group delay dispersion （GDD） and the scanning electron microscope. The research indicates： the refractive index in the design should be calculated from the experiment; increasing the thickness of total film and the cavity introduces the higher GDD; the electric field distribution decides the position of the sensitive layers; the thinnest layer may not be the most sensitive layer; the sensitive layers request high deposition accuracy ; interface roughness and inhomogeneity are both the important factors.

关 键 词：薄膜 负色散镜 Gires—Tournois 误差分析 群延迟色散 折射率 膜厚 

分 类 号：O484[理学—固体物理]