腔面镀膜分布反馈量子级联激光器  

Distributed feedback quantum cascade lasers with high-reflective coating

作　　者：魏林[1] 李耀耀[1] 李爱珍[1] 徐刚毅[1] 张永刚[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海200050

出　　处：《功能材料与器件学报》2009年第3期233-237,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金(编号:60676026;60406008;60136010);863项目(2006AA03Z0406);973(2006CB604903)

摘　　要：报道了后腔面蒸镀高反射率镀膜工艺及其对分布反馈量子级联激光器性能影响的研究结果。与没有腔面镀膜的器件相比,采用了腔面镀膜工艺的器件,室温下的阈值电流密度降低了20%,前腔面出光峰值功率提高了50%,斜率效率提高了44%。通过对比镀膜和未镀膜器件的阈值电流密度,估算出器件的波导损耗约为7.25cm-1。A study on distributed feedback quantum cascade lasers （ DFB - QCLs） with rear facet high - reflectivity （HR） coated has been presented. Compared the DFB - QCLs with and without facets HR coating, the threshold current density was reduced by 20% and the optical output peak power was increased by 50% and the slope efficiency was increased by 44% at room temperature. From the comparison of the threshold current densities of DFB - QCLs with and without HR coated, the waveguide loss of the laser is about 7.25 cm^-1.

关 键 词：分布反馈量子级联激光器 高反射率腔面镀膜 

分 类 号：O47[理学—半导体物理]