人造金刚石加热系统分析及其精密交流调功器设计  

Heating System Analysis and Precise AC Power Regulator Design of Synthetic Diamond

作　　者：莫金海[1,2] 韦寿祺[2] 何少佳[2] 王红[2] 邹云屏[1] 

机构地区：[1]华中科技大学电气与电子工程学院,武汉430074 [2]桂林电子科技大学机电工程学院,桂林541004

出　　处：《人工晶体学报》2009年第3期612-619,共8页Journal of Synthetic Crystals

基　　金：广西青年科学基金(No.0007011);广西教育厅立项项目(No.200808LX127)

摘　　要：建立了加热系统的数学模型,深入分析各类交流加热的特性及差别,指出恒功率加热方式温控效果最佳且与直流加热无明显区别。建立恒功率交流加热系统SABER仿真模型并深入分析系统构成特性,设计一个基于适当功率滤波和输出偏置的模拟PID控制器。仿真和实验结果表明,所设计交流调功器具有成本低、实时性强、适应性好、控制性能佳、温控精度高等特点,能较好地满足金刚石合成工艺的要求。The mathematical model of the heating system for diamond synthesizing is established and three types of AC（Alternating Current） heating system were analyzed. It is concluded that the constant power AC heating system （CPACHS） is near to DC （Direct Current） heating in temperature control precision. CPACHS＇simulation model is elaborately built and its characteristics are thoroughly analyzed in SABER platform, a bias analog PID controller with an appropriate power filter is proposed to improve the CPACHS＇ control properties. Simulation and experiment results show that the suggested CPACHS has characteristics of low cost, strong real-time capability, well adaptability, good control performance and high control precision; it can well meets the technical requirements of diamond synthesizing.

关 键 词：人造金刚石 六面顶压机 PID控制 交流调功器 SABER仿真 

分 类 号：TQ164[化学工程—高温制品工业]