应用硅和非硅MEMS技术的微型直接甲醇燃料电池(英文)  

Micro direct methanol fuel cells based on silicon and non-silicon MEMS technologies

作　　者：汤小川[1] 张宇峰[1] 苑振宇[1] 王喜莲[1] 刘晓为[1,2] 

机构地区：[1]哈尔滨工业大学MEMS中心,黑龙江哈尔滨150001 [2]哈尔滨工业大学微系统与微结构制造教育部重点实验室,黑龙江哈尔滨150001

出　　处：《光学精密工程》2009年第6期1218-1222,共5页Optics and Precision Engineering

基　　金：Supported by the National Natural Science Foundation of China(Grant No.60806037);the National Hi-Tech Research and Development Programof China(863 Program) (Grant No .2006AA04Z353);The Ph.D.Programs Foundation of Ministry of Education of China (Grant No.20070213057)

摘　　要：分别以硅和不锈钢材料为极板研制了两种结构简单、体积小、比能量密度高的微型直接甲醇燃料电池,并介绍了该电池的工作原理和结构。利用光刻、溅射和腐蚀等MEMS技术完成了硅基微型直接甲醇燃料电池的制作,实验测试表明,在室温条件下,使用1.5 mol/L甲醇溶液供液时其开路输出电压为520mV,最大输出功率密度达到5.9mW/cm2;利用非硅微加工技术完成的不锈钢微型直接甲醇燃料电池,在室温下用2mol/L甲醇溶液供液时开路输出电压为650mV,最大输出功率密度达到15.8mW/cm2。Two kinds of micro Direct Methanol Fuel Cells（μ-DMFC） characterized by simple configurations, small sizes and high specific power densities are presented by using silicon and stainless steel as poles in this paper, The working principle and structure of the μ-DMFC are introduced. Then,the silicon μ-DMFC is accomplished using Micro Electro Mechanic System（MEMS） technologies such as lithography, depositing and etching. Experimental results show that the open circuit voltage is 520 mV and the peak power density can reach 5.9 mW/cm^2 for the silicon μ-DMFC at room temperature when the molar concentration of methanol solution is 1.5 mol/L. Moreover, the stainless steel μ-DMFC is fabricated using a non-silicon micromachining technology,and it can offer an open circuit voltage of 650 mV and a peak power density of 15, 8 mW/cm^2 under the 2 mol/L methanol solution at room temperature. It is concluded that the performance of the stainless steel μ-DMFC is greatly better than that of the silicon μ-DMFC.

关 键 词：甲醇燃料电池 硅基技术 非硅微加工 微机电系统 最大功率密度 

分 类 号：TM911.4[电气工程—电力电子与电力传动]