用于微机电系统的微型带阻滤波器(英文)  

Compact band reject filter for micro electromechanical systems

作　　者：黄闯[1] 陈迪[1] 陈翔[1] 刘景全[1] 朱军[1] 魏雯婕[2] 魏泽勇[2] 李宏强[2] 

机构地区：[1]上海交通大学微米纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海200240 [2]同济大学物理系,上海200092

出　　处：《光学精密工程》2009年第6期1244-1250,共7页Optics and Precision Engineering

基　　金：Supported by the DFGInternational Research Training Group,Materials and Concepts for Advanced Interconnects;the Foundation of National Key Laboratory of Micro/Nano Fabrication Technology(Grant No .9140C7903060706);Science and Technology Commission of Shanghai Municipality(Grant No .05JC14061)

摘　　要：为了实现微机电系统微波信号滤波,开发了适用于微机电系统的小尺寸左右手复合传输线微波带阻滤波器,对该滤波器的原理、结构特点、加工工艺等进行了研究。根据左手材料理论,介绍了具有蛇形槽单元的滤波器结构。以蛇形槽结构的一个单元为例,对比传统插指电容左手单元结构,提取了蛇形槽的等效电路,并分析了蛇形槽结构单元的优点,即在相同的面积内,可以获得更大的等效电路参数。最后,结合溅射、光刻、电铸、刻蚀等MEMS技术,设计了器件的加工工艺。使用MEMS工艺,加工了主体尺寸5mm×7mm的器件。相移常数的仿真和实验结果表明,在高频带部分(2.1～5.2GHz)的相移常数为负(左手区) ,相速度与群速度方向相反,左手区的相对带宽为82.7%。结果显示,与其他设计相比,本文设计的器件尺寸小,左手区的相对带宽大。In order to filtrate the microwave signals in micro electronic mechanical systems, a micro Composite Right/Left Handed（CRLH） transmission line band reject filter is presented,and the design theory, structure characteristics and fabrication process of the filter are also studied. According to the Left Handed Material （LHM） theory, the filter structure with a meander gap is introduced,and the equivalent circuit of the meander gap structure is obtained by comparing to the conventional interdigital capacitor structure. Then, the advantage of the meander gap structure is discussed by taking a cell of the meander gap as an example, and the results show that the equivalent circuit parameters in the meander gap structure are larger than that of the conventional interdigital capacitor structure. Finally, the fabrication process is introduced by combining different MEMS （Micro Electromechanical Systems） technologies, such as sputtering, lithography, electroplating and etching. By the MEMS technology,a band reject filter with the size of the main part of 5 mm× 7 mm is developed. The simulated and experimental results show that the phase shift constant of the band reject filter is negative at the high frequency （2.1-5.2 GHz, left handed region） ,and the phase velocity flows just to the opposite direction of the energy flow in the left region. Moreover, the relative pass bandwidth in a left handed region is 82.7%. Compared with other designs, this filter shows his advantages in small sizes and large working bands at the left handed region.

关 键 词：微机电系统 左右手复合传输线 带阻滤波器 左手材料 

分 类 号：TN713.5[电子电信—电路与系统] TN603.5