基于电液动力效应的离子拖曳微泵(英文)  

Development of ion-drag EHD micropump

作　　者：于翮[1] 张强[1] 乔大勇[2] 俞坚[1] 

机构地区：[1]北京工业大学传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京100022 [2]西北工业大学陕西省微纳米系统实验室,陕西西安710072

出　　处：《光学精密工程》2009年第6期1338-1343,共6页Optics and Precision Engineering

基　　金：Supported by the National Natural Science Foundation of China (Grant No .50676001)

摘　　要：介绍了一种新型电子冷却系统—离子拖曳电液动力微泵,运用MEMS技术在硅片上加工了离子拖曳微泵并进行了测试,微泵由一组平面电极组成,电极的宽度为40μm,发射极和集电极之间的间距为50μm,共有90对电极对,每组电极对之间的距离为100μm。微泵静压力实验以HFE7100和无水乙醇作工作流体,通过施加直流电压来驱动工作流体,当输入电压为200 V时,微泵可以得到250 Pa的静压力。实验结果表明:微泵的静压力与施加的输入电压成二次方关系,同微流道的高度成反比。实验发现工作介质的物性参数也是决定泵性能的一个重要因素,选择合适的流体可以提高整个微泵冷却系统的性能。研究还表明,微泵的性能与工作寿命和实验环境的洁净度以及工作流体提纯密切相关。A novel electronics cooling system--ion drag Electrohydrodynamic （EHD） mieropump was introduced. The ion drag EHD micropump containing a planar electrode array on a silicon substrate was fabricated and tested, in which the electrodes were paired as an emitter and a collector with 40μm width and 50μm gap between them,the number of electrode pairs was 90 and the gap between two electrode pairs was 100 μm. Static pressure tests were performed by a DC driving voltage and by HFE7100 and ethyl alcohol as working fluids. Experimental results show that the static pressure is quadratic proportion to the input voltage and inverse proportion to the channel height and the maximum pressure head achieved by this micropump is 250 Pa at an applied voltage of 200 V. These data proves that the performance of the ion-drag pump can be improved significantly by selecting the fluid with high permittivity and low viscosity. It also indicates that the cleanness degree of devices and the purification of the working fluid will greatly influence the performance and working lifetime of the EHD micropump.

关 键 词：电液动力效应 离子拖曳 微机电系统 微泵 

分 类 号：TH38[机械工程—机械制造及自动化] TK124[动力工程及工程热物理—工程热物理]