基于MEMS技术的柔性Ni基热敏传感器阵列研制  

Development of Flexible Nickel Thermal Sensor Array

作　　者：徐延光[1] 马炳和[1] 邓进军[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,西安710072

出　　处：《半导体技术》2009年第7期697-700,共4页Semiconductor Technology

基　　金：国家自然科学基金资助项目(50775188);国家863计划课题资助项目(2007AA04Z347)

摘　　要：利用Ni材料的高电阻温度系数特性,结合MEMS微加工技术,研究开发了全柔性的Ni基热敏传感器及其阵列。对传感器阵列的材料选择、Ni薄膜电阻的特点以及制备工艺进行了研究。通过油浴升温和电流阶跃响应方法实现了对传感器重要静态、动态参数的测量。实验结果表明,该热敏电阻传感器在5～80℃范围内具有电阻温度系数高、热响应速度快的特点。该柔性传感器阵列可方便贴附于曲型表面,为温度、速度、剪应力等快速分布式低侵入测量提供了新型支持手段。With MEMS fabrication technology, flexible Ni thermal sensor array was successfully fabricated. Sensing material selection, Ni-film resistor design and micro-fabrication technology of the flexible sensor array were researched. According to the methods of oil bath and current step response, static and dynamic parameters were measured. The experimental results show that thermal sensors in the range from 5 to 80 ℃ have a high TCR and fast thermal response speed. The flexible sensor array can be a new means for low-invasive distribution measurement of temperature, velocity, shear stress, especially on curved surfaces.

关 键 词：热敏传感器 Ni电阻 柔性基底 电阻温度系数 

分 类 号：TN212.1[电子电信—物理电子学]