压电陶瓷微位移器特性测试实验研究  

Laboratory Study of Characteristic Testing for Piezoelectric Ceramic Micropositioning

作　　者：李明[1] 薛晨阳[1] 翟成瑞[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《纳米科技》2009年第3期61-64,共4页

摘　　要：运用光学干涉原理,结合微系统测试分析仪器,分别对压电陶瓷管和压电陶瓷位移器的非线性特性进行测试研究,主要对升压及降压时PZT位移进行测试和电源驱动器闭环状态下的性能测试。Based on the theory of light interference, with the Micro System Analyzer, the article studied and tested the non-linearity character for the Piezoelectric ceramic tube and Piezoelectric ceramic Micro positioning. Primary tested the PZT positioning during increasing voltage and decreasing voltage. Also tested the performance of the power driver under the closed-loop.

关 键 词：压电陶瓷 微位移 压电陶瓷微位移器 闭环 干涉 

分 类 号：TH74[机械工程—光学工程]