锆钛酸铅压电陶瓷PZT7的形状记忆效应研究  

Fundamental study on lead zirconate titanate piezoelectric ceramics with shape memory effect

作　　者：王佩红[1,2] 章文[1] 田中克彦[3] 戴旭涵[2] 赵小林[2] 

机构地区：[1]安徽大学物理与材料科学学院,安徽合肥230039 [2]上海交通大学微纳科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海200240 [3]立命馆大学综合理工学研究机构,草津日本525-8577

出　　处：《功能材料》2009年第7期1108-1111,共4页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)资助项目(2006AA04Z360);国家留学基金资助项目(2007100950);安徽大学“质量工程”建设基金资助项目(XJ200907)

摘　　要：提出了一种新的方法可以使锆钛酸铅压电陶瓷PZT7具有形状记忆效应。用自制的Sawyer-Tower电路测试得到PZT7方形样品发生极化反转对应的电场强度大约为130kV/cm。当施加对称的饱和极化电压370V时,PZT7/Si(109/146μm)悬臂梁端部的变形-电场曲线呈现典型的"蝴蝶"形状。在外电场为0时,悬臂梁端部的变形为0。如果施加不对称的极化电压,悬臂梁端部的变形——电场曲线发生明显的变化。不同的反向极化电压使悬臂梁端部产生不同的变形,而且,电压和变形是一一对应的。因此,在外电场为零时,PZT7/Si悬臂梁可以具有多个不同的稳定位置,表现出明显的形状记忆效应。实验表明,对于长度为15.5mm的PZT7/Si悬臂梁而言,当施加的反向极化电压从120V回到0时,悬臂梁端部产生的变形最大,为68.5μm。The fundamental study about shape memory effect of lead zirconate titanate piezoelectric ceramics （PZT7） was carried out and a new method to make PZT7 material have shape memory effect was presented in this paper. The fabricated piezoelectric actuators are PZTT/Si （100/150μm） cantilevers with width of 5. 5ram and different lengths. The P-E hysteresis loop of PZT7 measured using Sawyer-Tower circuit shows that the coercive electric field of PZT7 is about 130kV/cm. When the voltage applied on the piezoelectric cantilever is saturated and symmetrical, the curve of piezoelectric strain versus electric field （D-E） is classical butterfly hysteresis one. However, the shape of D-E hysteresis loop has big change if the applied voltage is unsymmetrical. The piezoelectric cantilever may have multistable strain conditions after the applied unsaturated voltage return 0V from different voltages. Different unsaturated reverse voltages can make PZT7/Si cantilever being on different stable strain conditions. Therefore, unsaturated reverse voltages result in shape memory effect of PZT7. Experiments show that the PZT7/Si cantilever with length of 15.5mm and width of 5.5mm has biggest residual displacement and the tip＇s displacement is 68.5μm after the applied reverse voltage is changed from 120V to 0V.

关 键 词：压电陶瓷 PZT7 形状记忆效应 悬臂梁 极化电压 

分 类 号：TM282[一般工业技术—材料科学与工程]