位相型光瞳滤波器对共焦系统离焦工作状态横向分辨特性的影响  

Effect of phase-only pupil on lateral resolution property of the defocused confocal microscopy system

作　　者：汪洪滨[1] 邱丽荣[2] 赵维谦[2] 

机构地区：[1]哈尔滨汽轮机厂有限责任公司,哈尔滨150001 [2]北京理工大学光电学院,北京100081

出　　处：《光学技术》2009年第3期399-401,405,共4页Optical Technique

摘　　要：分析了共焦显微系统(CMS)离焦状态工作时分辨特性的变化,指出了离焦状态是导致CMS横向分辨特性变差的主要影响因素之一。提出并采用了位相型超分辨光瞳滤波技术来改善CMS工作在离焦状态下的横向分辨特性,分析了超分辨光瞳滤波器位置变化对CMS横向分辨特性的影响。理论分析和实验验证表明,位相型超分辨光瞳滤波技术的引入,显著抑制了CMS工作在离焦状态时艾里斑旁瓣的增长,克服了CMS因工作在离焦状态而引起的横向分辨特性下降的缺点。The variation of the resolution property of a defocused confccal microsoopy system （CMS） is analyzed and the defocused state is oonsidered as the main factor of influence on CMS lateral resolution property. In order to diminish this effect, superresolution pupil filtering technique using a phase-only pupil filter is propcsed to improve the lateral-resolution property of CMS under the defocused state, and the effect of pupil＇s position on CMS lateral resolution is analyzed. Experiments and analyses indicate that the phase-only pupil filter technique used obviously suppresses the increasing of side-lobe of Airy spot and prevents the decreasing of CMS lateral resolution caused by the defocused state, and reaches the superresolution in the lateral direction.

关 键 词：光学测量 共焦系统 位相型光瞳 离焦特性 表面轮廓 超分辨滤波 

分 类 号：TN742[电子电信—电路与系统]