气体微流量计测量小孔流导方法研究  

STUDY ON MEASUREMENT METHOD OF SMALL ORIFICE CONDUCTANCE USING GAS MICRO-FLOWMETER

作　　者：冯焱[1] 张涤新[1] 李得天[1] 成永军[1] 卢耀文[1] 赵澜[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2009年第2期95-98,107,共5页Vacuum and Cryogenics

摘　　要：介绍了利用气体微流量计的流量测量技术、采用PID和压力锯齿波动2种恒压控制模式测量小孔流导的原理和方法,并对2种控制模式的测量结果进行了比对,一致性好于0.14%。小孔流导的测量值与理论计算值之间有较大偏差,通过漏孔校准实验,证明前者具有更好的准确性。对于几何尺寸不规则的小孔,用实验方法获得其流导值具有实际应用价值。The principle and method of measuring conductance with PID constant pressure control mode and sawtooth variation constant pressure control mode are introduced. The comparison of two measurement method are done. The two agree fairly well, the difference is less than 0.14%o Through the experiment of leak calibration, it has been proved that experiment result is more accurate than theory calculation. For the irregular small orifice in shape, the experiment method of measuring conductance has the practical value.

关 键 词：气体微流量计 流导 测量方法 

分 类 号：TB771[一般工业技术—真空技术]