一种结合温差式和风速计式的新结构MEMS热式流量计  

A New Structure MEMS Thermal Flow Sensor Combining Two Principles

作　　者：陈则[1] 曾祥宇[1] 张晟[1] 黄宜平[1] 

机构地区：[1]复旦大学专用集成电路与系统国家重点实验室,上海200433

出　　处：《传感技术学报》2009年第7期934-940,共7页Chinese Journal of Sensors and Actuators

摘　　要：在器件结构上结合了温差式和风速计式两种检测原理,设计并制造了一种新型结构的MEMS热式流量计。在对温差式流量计的灵敏度、量程等特性进行了有限元仿真的基础上,优化设计了器件结构。同时,提出了一种利用Matlab/Simu-link时域仿真实现热源控制电路设计的方法。采用MEMS微加工技术研制了新型结构的热式流量计。测试结果表明该新设计比传统MEMS热式流量计灵敏度提高近4倍。A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured. A Finite Element Analysis of temperature-difference flow sensor is first performed to observe the sensitivity and range. The new design is based on the FEA results. A Matlab/Simulink modeling is then conducted to help design the new sensor and its control circuit. The sensor is manufactured by micromachining technology and finally tested, which is proved to be almost 4 times sensitive than traditional MEMS flow sensor.

关 键 词：微机电系统 热式流量计 有限元分析 MATLAB 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]