基于MEMS技术的气体热导传感器的应用研究  

Applicable Research of Thermal Conductivity Sensor for Gases Based on MEMS

作　　者：王浩宇[1] 曹建[1] 安晨光[2] 

机构地区：[1]中南大学物理科学与技术学院,长沙410083 [2]北京华电云通电力技术有限公司,北京100069

出　　处：《传感技术学报》2009年第7期1050-1054,共5页Chinese Journal of Sensors and Actuators

摘　　要：针对传统的气体热导检测器在气体检测应用中存在检测精度差、灵敏度低、温度漂移大的缺点,本设计采用新型的MEMS气体热导传感器,设计了一种高性能的气体浓度检测系统。设计了一种高精度的双恒流源电路对电桥供电,运用微信号检测技术和温度补偿手段,采取模拟滤波和数字滤波相结合的方法,有效的抑制了各种类型的噪声干扰,提高了系统测量的精度与灵敏度,实现了微量气体浓度的准确测量,克服了传统气体热导检测的缺点。Traditional thermal conductivity detector has the disadvantages of low precision, low sensitivity and large temperature drift in the gases analysis. Therefore, high performance system for gases detection was designed using the MEMS thermal conductivity gas sensor. In this system, a high precision double-cur- rent source was designed to provide the bridge with power,and weak signal detection （WSD）technology, temperature compensation methods and analog filter together with digital filter were used to reduce different kinds of noise. So the system has high precision and sensitivity and can accurately detect low content gas,which has overcome the disadvantages of traditional thermal conductivity detection.

关 键 词：MEMS TCD TCS208F 滤波 噪声 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]