三丝结构气流式水平姿态传感器的研究  

Study on the Airflow Level Posture Sensor with Three Wire Structure

作　　者：朴林华[1] 丁霞[2] 李言杰[1] 李白华[1] 张福学[1] 

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]青岛科技大学数理学院,山东青岛266061

出　　处：《压电与声光》2009年第4期504-506,509,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划基金资助项目(NCET);北京市优秀人才培养基金资助项目;北京市重点实验室开放课题基金资助项目;北京市属高校人才强教计划基金资助项目(PHR);北京市新世纪百千万人才工程培养基金资助项目

摘　　要：该文确定了三丝结构中加热热电阻丝和检测热电阻丝的最佳排列方式。采用有限元法,利用AN-SYS-FLOTRAN CFD软件,通过建模、划分网格、加载和求解等途径,计算了在不同倾斜状态下几种三丝结构敏感元件内流场的分布。计算结果表明,当β(β为加热热电阻丝和检测热电阻丝构成的平面与基准面夹角)改变时,温度场和流场都发生变化。两个检测热电阻丝处气流速度差Δv与倾角关系曲线也随β发生变化;当β=0°时,线性范围最小,斜率最小;当β=30°时,线性最好,斜率较大;β=60°时,线性范围较窄,斜率最大。当β=0°时,传感器线性范围最小,灵敏度最小;当β=30°时,传感器的线性最好,灵敏度比较大;β=60°时,线性范围较窄,灵敏度最大。综合比较,取β=30°为最佳方案。In this paper, the best arrange manner of the heating thermal resistance wire and of the detection thermal resistance wires with three wire structure is achieved. Using the finite element method, ANSYS-FLOTRAN CFD program and by means of a series of procedure,such as model building, network modifying,loads applying and equation solving ,some kinds of fluid field＇s distributing, within the sensing element with three wire structure, has been obtained in many different incline states. The results indicate that if β（β is the angle of a horizontal and the plane made up of the two wires）changes, both temperature-field and fluid-field will change. The velocity difference △v of gas flow at both detection thermal resistance wires and tilt-angle relation curve will change with fl, when β=0°, linearity range is narrowest, and slope is lowest ; while when β=30°, linearity is best, and slope is larger; as β=60°, linearity range is narrower, and slope is largest. When β=0°, sensor＇s linearity range is narrowest, sensitivity is lowest;when β=30°,sensor＇s linearity is best,sensitivity is higher; while when β=60°, linearity range is narrower ,and sensitivity is highest. Thus,the best project is the state of β=30°.

关 键 词：三丝 姿态 敏感结构 流场 

分 类 号：TN379[电子电信—物理电子学] TN37