飞秒激光在光敏玻璃上制作微凹面  

Micro-concave-surface Fabricated on a Photosensitive Glass by Femtosecond Laser

作　　者：巫殷忠[1,2] 王清月[2] 贾威[2] 胡明列[2] 柴路[2] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]天津大学精密仪器与光电子工程学院超快激光实验室光电信息技术科学教育部重点实验室,天津300072

出　　处：《光子学报》2009年第7期1597-1601,共5页Acta Photonica Sinica

基　　金：教育部科学技术研究重大项目(10410);天津市科技发展计划科技攻关培育项目(G043103911)资助

摘　　要：利用聚焦的飞秒激光(中心波长775nm、脉宽150fs)照射FOTURAN光敏玻璃,经热处理及浓度为8%的氢氟酸溶液室温腐蚀50min后,在FOTURAN玻璃表面制作了微凹面.利用原子力显微镜和扫描电子显微镜分析了微凹面的形貌,发现它具有光滑璧面和清晰边缘,直径约为几十微米.通过分别改变入射激光的单脉冲能量(970～3250nJ)和脉冲数目(10～3000个),研究了它们对微凹面制作结果的影响,发现了微凹面的直径随激光入射参量的饱和效应,并解释了其原因;指出了飞秒激光在FOTURAN上制作微结构的应用.Micro-concave-surfaces were fabricated on the surface of a photosensitive glass （FOTURAN） by focused irradiation of femtosecond laser （with 775 nm-wavelength and 150 fs-pulse duration）, heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid （HF） for 50 minutes at room temperature. The morphologies of the micro-concave-surfaces were analyzed by atomic force microscope （AFM） and scanning electron microscope （SEM）. The analysis indicates that the micro- concave-surfaces have smooth wall, clear edge, and are several tens of microns in diameter. By varying the incident single pulse energy （from 970 to 3 250 nJ） and number of pulses （from 10 to 3 000 shots）, influences of these two laser parameters on the fabrication results were characterized. The diameters of micro-concave-surfaces were found to saturate with these two incident parameters, and the reason was given. And, applications of mcirostructures fabricated on FOTURAN by femtosecond laser were pointed out.

关 键 词：飞秒激光 微凹面 微细加工 FOTURAN玻璃 光敏玻璃 

分 类 号：TN249[电子电信—物理电子学]